San Francisco, Calif., July 16, 2001 --- IMEC, Europe’s leading independent microelectronics and ICT R&D center, has non-exclusively licensed its Rotagoni™ drying technique to Verteq, Inc., a leading supplier of advanced wafer cleaning technologies and solutions for single-wafer and batch applications. The Rotagoni™ technique has been integrated in Verteq’s Goldfinger™ single-wafer, megasonic-cleaning system.

With the new challenges of sub-0.18µm technology and the aggressive productivity targets of 300mm production lines, single-wafer cluster tools become an absolute necessity. Up to now, single-wafer wet cleaning has been hampered by the lack of a fast, high-performance watermark-free drying technique. IMEC’s Rotagoni™ method solves this problem by a unique interaction between the Marangoni effect and rotational forces.  The technique shows excellent robustness on particle neutrality and high particle removal efficiency and is perfectly suited for advanced cleaning applications.

“This agreement with Verteq proves the capabilities of our Rotagoni™ drying method,” says Prof. Gilbert Declerck, President and CEO of IMEC. “We are pleased that the Rotagoni™ technique is now commercially available through Verteq, whose experience in single-wafer cleaning is recognized worldwide.”

“By combining new, single-wafer megasonic technology with advanced process and wafer drying technologies, such as IMEC’s Rotagoni™ surface tension gradient drying process, Verteq’s Goldfinger Mach series™ perfectly meets the production requirements of advanced geometries and materials,” said John Breslin, president and CEO of Verteq.

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Notes to editors:

Rotagoni™ is an IMEC registered tradename

Goldfinger™ is a Verteq registered tradename

About IMEC

IMEC was founded in 1984 and today is Europe's leading independent research center for the development and licensing of microelectronics, and information and communication technologies (ICT). IMEC is headquartered in Leuven, Belgium, and has a staff of more than 1000 people including more than 200 industrial residents. Its more than $100 million revenue is derived from agreements and contracts with Flemish government, the EC, MEDEA, the European Space Agency, equipment and material suppliers and semiconductor companies worldwide. IMEC's activities concentrate on design of integrated information and communication systems; silicon process technology; silicon technology and device integration; microsystems, components and packaging; advanced training in microelectronics. IMEC has a sub-0.25µm 200mm pilot line and is ISO9001 certified. News from IMEC is located at www.imec.be.

About Verteq

Verteq is a leading supplier of advanced wafer cleaning technologies and solutions for single-wafer and batch applications. The company’s new Goldfinger™ Mach advanced-megasonic, single-wafer, technology provides non-damaging particle removal from critical IC features to enhance yields for 150nm to 70nm IC generations. Utilizing leading-edge process and equipment technologies, Verteq is providing the highest levels of wafer cleanliness and manufacturing productivity in cleaning processes for gate stacks and bit lines, deep vias, pre-diffusion, post-CMP, initial and monitor wafer, and other cleaning steps.  In combining process expertise, equipment ingenuity, and worldwide service support, Verteq is a valuable resource to both end-users and OEMs looking for a competitive advantage through wafer cleaning performance.

Verteq is headquartered in Santa Ana, Calif., and maintains sales and service locations throughout North America, Europe, and Asia.

For more information:

Katrien Marent

Communication Manager

Public Relations and Marketing Communications

IMEC, Kapeldreef 75

B- 3001 Leuven, Belgium

Tel +32 16 28 18 80      Fax +32 16 28 16 37

Email: Katrien.Marent@imec.be