Imec News

Archive 2002

Matsushita joins IMEC’s worldwide high-k research team


Leuven, Belgium, November 19, 2002 --- Matsushita Electric Industrial Co. Ltd., one of Japan’s leading integrated device manufacturers and IMEC, Europe’s leading independent microelectronics R&D center, will collaborate on the development and implementation of high-k gate stacks for (sub)-65nm devices.

The international technology roadmap for semiconductors (ITRS) has recognized the availability and integration of high-k gate stacks as one of the most difficult roadblocks to overcome. IMEC is tackling this challenge by global collaboration within two complementary industrial affiliation programs (IIAPs). Within the program “Advanced high-k dielectrics and metal gates for (sub)-65nm devices” the material properties related to the high-k dielectric gate stack are being investigated through physical analysis and electrical characterization in simple capacitor and transistor structures. The program “Implementation of high-k gate stacks in advanced devices” will address the technological problems of compatibility with full front-end-of-line processing and will study aspects related to the influence of the new high-k modules on the device performance.

Matsushita has joined these programs to develop and implement high-k gate stacks for the (sub)-65nm node. As part of the contract, a Matsushita researcher will join IMEC’s research team. The agreement is considered as the start of a long-term partnership between the two organizations. The work will focus on the implementation of high-k gate stacks in advanced devices.

IMEC is already collaborating on the development of high-k dielectrics with International Sematech and Hitachi. With Matsushita joining IMEC’s high-k programs, a worldwide consortium of semiconductor manufacturers and IDMs will be well placed to accelerate the development and integration of high-k gate stacks.

“We are very pleased to have one of the leading Japanese IDMs, Matsushita, joining our worldwide research team on high-k dielectrics. Matsushita enriches the high-k team, currently comprising over 30 full-time experts, with world-class affiliate researchers. Together, we will take the crucial leap from process step development to device implementation of high-k gate stacks,” said Prof. Gilbert Declerck, President and CEO of IMEC. “The addition of Matsushita to this program is a significant extension of our partnerships in the strategically important Japanese sector.”

“Low-power-consumption system ICs implemented in the (sub)-65nm technology using high-k gate dielectrics are essential for Matsushita’s future information home appliances such as digital TVs, optical discs, and mobile communication equipment.  I look forward to the expected accomplishments coming from joining this notable IMEC program,” said Mr. Yukio Furuta, Director of Corporate Manufacturing & Development Division, Semiconductor Company of Matsushita.  ”I’m sure that Matsushita’s researchers will be excited to work with world-class researchers on this team.”


Notes to editors

About IMEC

IMEC was founded in 1984 and today is Europe’s largest independent research center in the field of microelectronics, nanotechnology, enabling design methods and technologies for ICT systems. IMEC's activities concentrate on the design technology for integrated information and communication systems; silicon process technology; silicon technology and device integration; nanotechnology, microsystems, components and packaging; solar cells; and advanced training in microelectronics. IMEC is headquartered in Leuven, Belgium, and has a staff of more than 1200 people including over 350 industrial residents and guest researchers. IMEC has a 0.13µm 200mm pilot line and is ISO9001 certified. Its revenue of more than 120Meuro is derived from agreements and contracts with the Flemish government and companies, the EC, MEDEA+, the European Space Agency, equipment and material suppliers, and semiconductor and system-oriented companies worldwide. News from IMEC is located at

For more information:

Katrien Marent

Corporate Communication Manager

IMEC, Kapeldreef 75

B- 3001 Leuven, Belgium

Tel +32 16 28 18 80 Fax +32 16 28 16 37


About Matsushita Electric

Matsushita Electric Industrial Co., Ltd., best known for its Panasonic, National, Technics, and Quasar brand names, is a worldwide leader in the development and manufacture of electronics products for a wide range of consumer, business, and industrial needs. Based in Osaka, Japan, the company recorded consolidated sales of US$51.70 billion for the fiscal year ended March 31, 2002. In addition to the Tokyo and other Japanese stock exchanges (6752), Matsushita's shares are also listed on the Amsterdam, Dusseldorf, Frankfurt, New York, Pacific (NYSE/PCX: MC), and Paris stock exchanges. For more information, visit the Matsushita web site at

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