CMORE - heterogeneous integration
Imec tunes and extends CMOS processes with new processing steps to make novel CMOS micro- and nanodevices, adding functions other than logic and memory to the chips. Possible applications are MEMS (micro-electromechanical systems) and NEMS (nano-electromechanical systems) such as smart sensors, actuators, or power scavengers, but also biochips, micro-implantable appliances, or solar cells.
Under the name CMORE, imec offers heterogeneous integration services to the industry. CMORE services range from development-on-demand, over prototyping, to low-volume production. These services profit from the expertise in many research areas available at imec, such as our outstanding reliability expertise. The CMORE solutions are implemented in imec’s 200mm cleanroom with advanced packaging capabilities, such as 3D integration. The two process platforms involved are a 0.13µm CMOS process and a versatile SiGe above-IC MEMS process. And on demand, the CMORE solution can even be migrated to imec’s 300mm fab.