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CMORE - heterogeneous integration

RF-MEMS

RF-MEMS is a disruptive technology, commonly seen as key for future telecommunication systems. It may overcome several of the trade-offs in today's wireless communication. Imec's RF-MEMS technology is based on fabricating small, low-weight and high-performance RF components, including switches, varicaps, resonators and (tunable/switchable) filters. Two main directions are explored:

• Metal RF-MEMS passive technology platforms for building switches, inductors, capacitors,power splitters, and varicaps integrated with regular passive components such as transmission lines.
• Silicon or SiGe-based technologies for building relays, high-Q resonators, and filters.

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