Scaling-driven nanoelectronics
New materials
For the post-CMOS era, imec is exploring the use of carbon nanotubes, semiconducting nanowires, and graphene. In a first stage, imec is looking to use carbon nanotubes as interconnects, and nanowires as core for tunnelFET devices.
Invent - In 2007, imec has further studied the growth characteristics of carbon nanomolecules, with the goal of finding an economic, large-scale manufacturing technique. For example, for carbon nanotubes (CNT), imec has examined the growth through chemical vapor deposition (CVD) using various catalysts.
Achieve - In 2007, imec demonstrated that Indium particle catalysts ensure high-yield growth of Si nanowires compatible with Si technology. Indium-assisted growth of Si nanowires with plasma-enhanced CVD leads to monocrystalline Si wires oriented along the [111] direction for diameters above 40-60nm.